Iterative Deconvolution for Exposure Planning in Scanning Laser Lithography
- Creator: Ghalehbeygi, Omid T. , O'Connor, John , Routley, Ben S. , Fleming, Andrew J.
- Resource Type: conference paper
- Date: 2018
A nonlinear programming approach to exposure optimization in scanning laser lithography
- Creator: Fleming, Andrew J. , Wills, Adrian , Ghalehbeygi, Omid T. , Routley, Ben , Ninness, Brett
- Resource Type: conference paper
- Date: 2016
Exposure optimization in scanning laser lithography
- Creator: Fleming, Andrew J. , Wills, Adrian G. , Routley, Ben S.
- Resource Type: journal article
- Date: 2016
A closed-loop phase-locked interferometer for wide bandwidth position sensing
- Creator: Fleming, Andrew J. , Routley, Ben , Holdsworth, John L.
- Resource Type: conference paper
- Date: 2015